Nanopositioning System With Force Feedback for High-Performance Tracking and Vibration Control
نویسندگان
چکیده
منابع مشابه
High Performance Nanopositioning with Integrated Strain and Force Feedback ⋆
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ژورنال
عنوان ژورنال: IEEE/ASME Transactions on Mechatronics
سال: 2010
ISSN: 1083-4435,1941-014X
DOI: 10.1109/tmech.2009.2028422